AMC Cleanroom Monitor: AirSentry II Multi-Point System from Particle Measuring Systems

Description

The AirSentry® II Multi-point Monitoring System is the most advanced airborne molecular contamination (AMC) monitor available, utilizing sensitive and responsive ion mobility spectrometry to detect and characterize airborne molecular contamination from multiple locations within a cleanroom. The system features a 16- or 30-point manifold sampling system and an on-board industrial computer with secure software and communications.

In modern cleanroom manufacturing areas, process tools are often spread over large cleanroom areas and multiple floors. Air handlers recirculate the majority of air within a cleanroom which can easily spread molecular contamination to unwanted areas, negatively impacting process steps located away from actual contamination sources. The AirSentry II AMC Monitoring System provides a central and cost-effective monitoring station that allows for rapid contamination detection, as well as monitoring sequences to cover a wide number of sample points spread across a facility. A critical part of a strategic AMC monitoring program.